Effect of Ar+ ion implantation on the nano-mechanical properties and microstructure of single crystal silicon
Rong Sun; Tao Xu; Qun-ji Xue
- 作者Rong Sun; Tao Xu; Qun-ji Xue
- 卷第249卷
- 印刷ISSN0169-4332
- 文件大小222.01KB
- 发表时间2005
- DOI10.1016/j.apsusc.2004.12.015
- 页码386-392