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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators

Piazza, G.; Stephanou, P.J.; Wijesundara, M.B.J.; Pisano, A.P.
  • 作者Piazza, G.; Stephanou, P.J.; Wijesundara, M.B.J.; Pisano, A.P.
  • 卷第2卷
  • 文件大小705.03KB
  • 发表时间2005
  • DOI10.1109/sensor.2005.1497509
  • 页码2065-2068
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