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[IEEE IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Nagoya University, Japan (Nov. 7, 2005)] IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Microfabrication and characterization of evolutionary mems resonators

[IEEE IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Nagoya University, Japan (Nov. 7, 2005)] IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Microfabrication and characterization of evolutionary mems resonators

Kamalian, R.; Ying Zhang, ; Agogino, A.M.

作者Kamalian, R.; Ying Zhang, ; Agogino, A.M.
文件大小983.61KB
发表时间2005
DOI10.1109/mhs.2005.1589972
页码101-106

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