[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion
- 作者Todd, S.T.; Ankur Jain, ; Hongwei Qu, ; Huikai Xie,
- 文件大小582.99KB
- 发表时间2005
- DOI10.1109/omems.2005.1540059
- 页码27-28
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