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[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Modeling, Simulation, and Testing of the Mechanical Dynamics of an RF MEMS Switch

[IEEE 2005 International Conference on MEMS,NANO and Smart Systems - Banff, AB, Canada (24-27 July 2005)] 2005 International Conference on MEMS,NANO and Smart Systems - Modeling, Simulation, and Testing of the Mechanical Dynamics of an RF MEMS Switch

Massad, J.E.; Sumali, H.; Epp, D.S.; Dyck, C.W.

作者Massad, J.E.; Sumali, H.; Epp, D.S.; Dyck, C.W.
文件大小521.12KB
发表时间2005
DOI10.1109/icmens.2005.77
页码237-240

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