Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas
Polomarov, Oleg V.; Theodosiou, Constantine E.; Kaganovich, Igor D.; Ramamurthi, Badri N.; Economou, Demetre J.
- 期刊名称Physics of Plasmas
- 作者Polomarov, Oleg V.; Theodosiou, Constantine E.; Kaganovich, Igor D.; Ramamurthi, Badri N.; Economou, Demetre J.
- 卷第12卷
- 期第10期
- 印刷ISSN1070-664X
- 文件大小543.70KB
- 发表时间2005
- DOI10.1063/1.2034407