Optical properties and microstructure of plasma deposited Ta[sub 2]O[sub 5] and Nb[sub 2]O[sub 5] films
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Szymanowski, H.; Zabeida, O.; Klemberg-Sapieha, J. E.; Martinu, L.
- 卷第23卷
- 期第2期
- 印刷ISSN0734-2101
- 文件大小428.68KB
- 发表时间2005
- DOI10.1116/1.1851544
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