Three-dimensional imaging of individual hafnium atoms inside a semiconductor device

van Benthem, Klaus; Lupini, Andrew R.; Kim, Miyoung; Baik, Hion Suck; Doh, SeokJoo; Lee, Jong-Ho; Oxley, Mark P.; Findlay, Scott D.; Allen, Leslie J.; Luck, Julia T.; Pennycook, Stephen J.

期刊名称Applied Physics Letters
作者van Benthem, Klaus; Lupini, Andrew R.; Kim, Miyoung; Baik, Hion Suck; Doh, SeokJoo; Lee, Jong-Ho; Oxley, Mark P.; Findlay, Scott D.; Allen, Leslie J.; Luck, Julia T.; Pennycook, Stephen J.
卷第87卷
期第3期
印刷ISSN0003-6951
文件大小586.20KB
发表时间2005
DOI10.1063/1.1991989

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Three-dimensional imaging of individual hafnium atoms inside a semiconductor device