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Study on strain and piezoelectric polarization of AlN thin films grown on Si

Y. Deng; Y. Kong; Y. Zheng; C. Zhou; D. Xi; P. Chen; S. Gu; B. Shen; R. Zhang; P. Han; R. Jiang; Y. Shi

作者Y. Deng; Y. Kong; Y. Zheng; C. Zhou; D. Xi; P. Chen; S. Gu; B. Shen; R. Zhang; P. Han; R. Jiang; Y. Shi
文件大小326.48KB
发表时间2005
DOI10.1116/1.1927533