[IEEE 2005 IEEE International Conference on Mechatronics - Taipei, Taiwan (10-12 July 2005)] IEEE International Conference on Mechatronics, 2005. ICM '05. - Analysis and improvement of dynamic characteristic of 3-axis nano stage

Choong Kim, ; Kang-Nyung Lee, ; Dong-Ju Lee, ; No-Cheol Park, ; Young-Pil Park, ; Jung-Woo Park, ; Dong-Jin Lee, ; Moon Gu Lee, ; Hyoung Gil Choi, ; Suk-Won Lee,

作者Choong Kim, ; Kang-Nyung Lee, ; Dong-Ju Lee, ; No-Cheol Park, ; Young-Pil Park, ; Jung-Woo Park, ; Dong-Jin Lee, ; Moon Gu Lee, ; Hyoung Gil Choi, ; Suk-Won Lee,
文件大小757.64KB
发表时间2005
DOI10.1109/icmech.2005.1529223
页码34-38

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[IEEE 2005 IEEE International Conference on Mechatronics - Taipei, Taiwan (10-12 July 2005)] IEEE International Conference on Mechatronics, 2005. ICM '05. - Analysis and improvement of dynamic characteristic of 3-axis nano stage