[IEEE Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (2005.10.25-2005.10.28)] Digest of Papers Microprocesses and Nanotechnology 2005 - Emission characteristics of silicon field emitter arrays as space charge and wafer charging neutralizer in ion implanter
Kojima, T.; Nakamura, K.; Gotoh, Y.; Nagao, M.; Tsuji, H.; Ishikawa, J.; Ikejiri, T.; Sakai, S.; Umisedo, S.; Nagai, N.
- 作者Kojima, T.; Nakamura, K.; Gotoh, Y.; Nagao, M.; Tsuji, H.; Ishikawa, J.; Ikejiri, T.; Sakai, S.; Umisedo, S.; Nagai, N.
- 文件大小864.73KB
- 发表时间2005
- DOI10.1109/imnc.2005.203767
- 页码120-121