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Carbon hard masks for etching sub-90 nm structures

Kevin A. Pears; Momtchil Stavrev; Alessia Scire; Ralf Koepe; Matthias Markert; Ulrich Egger; Lee Donohue

作者Kevin A. Pears; Momtchil Stavrev; Alessia Scire; Ralf Koepe; Matthias Markert; Ulrich Egger; Lee Donohue
卷第81卷
期第1期
印刷ISSN0167-9317
文件大小714.31KB
发表时间2005
DOI10.1016/j.mee.2005.05.002
页码156-161