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TaN/Ta bilayer barrier characteristics and integration for 90 and 65 nm nodes

J.-P. Jacquemin; E. Labonne; C. Yalicheff; E. Royet; P. Vannier; R. Delsol; P. Normandon

作者J.-P. Jacquemin; E. Labonne; C. Yalicheff; E. Royet; P. Vannier; R. Delsol; P. Normandon
卷第82卷
印刷ISSN0167-9317
文件大小322.18KB
发表时间2005
DOI10.1016/j.mee.2005.07.065
页码613-617