Effects of Oxygen Plasma Ashing on Barrier Dielectric SiCN Film
- 期刊名称Electrochemical and Solid-State Letters
- 作者Chen, C. W.; Chang, T. C.; Liu, P. T.; Tsai, T. M.; Tseng, T. Y.
- 卷第8卷
- 期第1期
- 印刷ISSN1099-0062
- 文件大小79.07KB
- 发表时间2005
- DOI10.1149/1.1833666
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