Chemical, optical, vibrational and luminescent properties of hydrogenated silicon-rich oxynitride films
Sandeep Kohli; Jeremy A. Theil; Patricia C. Dippo; Richard K. Ahrenkiel; Christopher D. Rithner; Peter K. Dorhout
- 作者Sandeep Kohli; Jeremy A. Theil; Patricia C. Dippo; Richard K. Ahrenkiel; Christopher D. Rithner; Peter K. Dorhout
- 卷第473卷
- 期第1期
- 印刷ISSN0040-6090
- 文件大小471.31KB
- 发表时间2005
- DOI10.1016/j.tsf.2004.07.054
- 页码89-97