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Chemical, optical, vibrational and luminescent properties of hydrogenated silicon-rich oxynitride films

Chemical, optical, vibrational and luminescent properties of hydrogenated silicon-rich oxynitride films

Sandeep Kohli; Jeremy A. Theil; Patricia C. Dippo; Richard K. Ahrenkiel; Christopher D. Rithner; Peter K. Dorhout
  • 作者Sandeep Kohli; Jeremy A. Theil; Patricia C. Dippo; Richard K. Ahrenkiel; Christopher D. Rithner; Peter K. Dorhout
  • 卷第473卷
  • 期第1期
  • 印刷ISSN0040-6090
  • 文件大小471.31KB
  • 发表时间2005
  • DOI10.1016/j.tsf.2004.07.054
  • 页码89-97
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