Effects of pretreatment by ion implantation and interlayer on adhesion between aluminum substrate and TiN film

• 作者Youming Liu; Liuhe Li; Xun Cai; Qiulong Chen; Ming Xu; Yawei Hu; Tik-Lam Cheung; C.H. Shek; Paul K. Chu
• 卷第493卷
• 印刷ISSN0040-6090
• 文件大小485.29KB
• 发表时间2005
• DOI10.1016/j.tsf.2005.06.045
• 页码152-159