Structure, hardness and thermal stability of TiAlN and nanolayered TiAlN/CrN multilayer films
- 作者Harish C. Barshilia; M. Surya Prakash; Anjana Jain; K.S. Rajam
- 卷第77卷
- 期第2期
- 印刷ISSN0042-207X
- 文件大小426.78KB
- 发表时间2005
- DOI10.1016/j.vacuum.2004.08.020
- 页码169-179
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