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Co-gas impact of B[sub 2]H[sub 6] plasma diluted with helium on the plasma doping process in a pulsed glow-discharge system

Co-gas impact of B[sub 2]H[sub 6] plasma diluted with helium on the plasma doping process in a pulsed glow-discharge system

S. Qin; A. Mcteer; Y. J. Hu

作者S. Qin; A. Mcteer; Y. J. Hu
文件大小665.38KB
发表时间2005
DOI10.1116/1.2083929

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