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Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography

Nanoscale fabrication in aqueous KOH solution using tribo-nanolithography

N. Kawasegi; J. W. Park; N. Morita; S. Yamada; N. Takano; T. Oyama; K. Ashida

作者N. Kawasegi; J. W. Park; N. Morita; S. Yamada; N. Takano; T. Oyama; K. Ashida
文件大小1103.28KB
发表时间2005
DOI10.1116/1.2126674

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