Fabrication and Characterization of Sub-100 µm Diameter Gallium Phosphide Solid Immersion Lens Arrays
- 期刊名称Japanese Journal of Applied Physics
- 作者Lang, Matthew; Milster, Tom D.; Minamitani, Takahisa; Borek, Gregg; Brown, David
- 卷第44卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小254.48KB
- 发表时间2005-5-24
- DOI10.1143/jjap.44.3385
- 页码3385-3387
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