Computational Studies of Voltage in RF Magnetron Discharge
- 期刊名称Japanese Journal of Applied Physics
- 作者Yamamoto, Masahiro; Nakashima, Seiji; Yamanishi, Hitoshi; Ogata, Shigenobu; Shibutani, Yoji
- 卷第44卷
- 期第12期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小215.53KB
- 发表时间2005-12-8
- DOI10.1143/JJAP.44.8635
- 页码8635-8639
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