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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Modifying residual stress and stress gradient in LPCVD SI/sub 3/N/sub 4/ film with ion implantation

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Modifying residual stress and stress gradient in LPCVD SI/sub 3/N/sub 4/ film with ion implantation

Wendian Shi, ; Haixia Zhang, ; Shasha Wang, ; Guobing Zhang, ; Zhihong Li,
  • 作者Wendian Shi, ; Haixia Zhang, ; Shasha Wang, ; Guobing Zhang, ; Zhihong Li,
  • 卷第1卷
  • 文件大小626.02KB
  • 发表时间2005
  • DOI10.1109/sensor.2005.1496544
  • 页码824-827
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