Spectroscopic second harmonic generation as a diagnostic tool in silicon materials processing
- 作者J. J. H. Gielis; A. A. E. Stevens; P. M. Gevers; H. C. W. Beijerinck; M. C. M. van de Sanden; W. M. M. Kessels
- 卷第2卷
- 期第12期
- 印刷ISSN1610-1634
- 电子ISSN1610-1642
- 文件大小178.77KB
- 发表时间2005
- DOI10.1002/pssc.200562219
- 页码3968-3972
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