Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || An Approach to the Development of Tolerance Systems for Micro- and Nanotechnology
- 作者Wilkening, Günter; Koenders, Ludger
- 文件大小260.95KB
- 发表时间2005
- DOI10.1002/3527606661.ch17
- 页码230-241
Accurate and traceable measurement of nano- and microstructuresDai, Gaoliang; Pohlenz, Frank; Xu, Min; Koenders, Ludger; Danzebrink, Hans-Ulrich; Wilkening, Günter · Measurement Science and Technology · 2006
Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro‐ and Nanometer Range) ||Wilkening, Günter; Koenders, Ludger · 2005
Dimensionelle Metrologie mittels Rastersondenmikroskopie (Dimensional Metrology based on Scanning Probe Microscopy)Herrmann, K.; Koenders, Ludger; Danzebrink, H.-U.; Hasche, Klaus; Wilkening, Günter; Pohlenz, F.; Kuetgens, U.; Mirandé, W.; Yacoot, A. · tm Technisches Messen · 2002
Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || IndexWilkening, Günter; Koenders, Ludger · 2005
Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || Front MatterWilkening, Günter; Koenders, Ludger · 2005
Entwicklung einer Kalibrierrichtlinie für Rastersondenmikroskope (Development of a Calibration Guideline for Scanning Probe Microscopes)Dziomba, Thorsten; Koenders, Ludger; Wilkening, Günter; Flemming, Marcel; Duparré, Angela · tm - Technisches Messen · 2005
Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || Nanometrology at the IMGCWilkening, Günter; Koenders, Ludger · 2005
Nanoscale Calibration Standards and Methods (Dimensional and Related Measurements in the Micro- and Nanometer Range) || Traceable Probing with an AFMWilkening, Günter; Koenders, Ludger · 2005