Fabrication of a Tantalum-Nitride Thin-Film Resistor with a Low-Variability Resistance
- 期刊名称IEEJ Transactions on Sensors and Micromachines
- 作者Akashi, Teruhisa
- 卷第125卷
- 期第4期
- 印刷ISSN1341-8939
- 电子ISSN1347-5525
- 文件大小6561.64KB
- 发表时间2005
- DOI10.1541/ieejsmas.125.182
- 页码182-187
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