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Angle-resolved XPS study on chemical bonds in ultrathin silicon oxynitride films

Angle-resolved XPS study on chemical bonds in ultrathin silicon oxynitride films

S. Shinagawa; H. Nohira; T. Ikuta; M. Hori; M. Kase; T. Hattori

作者S. Shinagawa; H. Nohira; T. Ikuta; M. Hori; M. Kase; T. Hattori
卷第80卷
印刷ISSN0167-9317
文件大小328.75KB
发表时间2005
DOI10.1016/j.mee.2005.04.049
页码98-101

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