Residual Stress and Microstructural Evolution in Tantalum Oxide Coatings on Silicon Nitride
- 作者C. M. Weyant; K. T. Faber; J. D. Almer; J. V. Guiheen
- 卷第88卷
- 期第8期
- 印刷ISSN0002-7820
- 电子ISSN1551-2916
- 文件大小1204.82KB
- 发表时间2005
- DOI10.1111/j.1551-2916.2005.00396.x
- 页码2169-2176
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