Development of an Automated Vapor/Liquid Hybrid Deposition System to Form High-k Dielectrics
- 作者D. Hojo; Y. Xuan; T. Yasuda
- 卷第12卷
- 期第4期
- 印刷ISSN0948-1907
- 电子ISSN1521-3862
- 文件大小397.51KB
- 发表时间2006
- DOI10.1002/cvde.200506438
- 页码214-219
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