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[IEEE The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Traverse City, MI, USA (2006.06.4-2006.06.8)] The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure

[IEEE The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Traverse City, MI, USA (2006.06.4-2006.06.8)] The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts. - Measurement of electromagnetic field in a radio frequency inductively coupled plasma at atmospheric pressure

Razzak, M.A.; Takamura, S.; Uesugi, Y.; Ohno, N.

作者Razzak, M.A.; Takamura, S.; Uesugi, Y.; Ohno, N.
文件大小128.07KB
发表时间2006
DOI10.1109/PLASMA.2006.1706960
页码88-88

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