Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

• 作者Youming Liu; Liuhe Li; Ming Xu; Xun Cai; Qiulong Chen; Yawei Hu; Paul K. Chu
• 卷第415卷
• 印刷ISSN0921-5093
• 文件大小466.93KB
• 发表时间2006
• DOI10.1016/j.msea.2005.09.063
• 页码140-144