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Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters

Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.; Nelson, Brent A.; Graham, Samuel; King, William P.

期刊名称Journal of Microelectromechanical Systems
作者Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.; Nelson, Brent A.; Graham, Samuel; King, William P.
卷第15卷
期第6期
印刷ISSN1057-7157
文件大小1701.87KB
发表时间2006-12
DOI10.1109/jmems.2006.886020
页码1644-1655