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Optical properties of amorphous GaAs[sub 1−x]N[sub x] film sputtering with different N[sub 2] partial pressures

Optical properties of amorphous GaAs[sub 1−x]N[sub x] film sputtering with different N[sub 2] partial pressures

Teng, X. M.; Fan, H. T; Pan, S. S.; Ye, C.; Li, G. H.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者Teng, X. M.; Fan, H. T; Pan, S. S.; Ye, C.; Li, G. H.
卷第24卷
期第5期
印刷ISSN0734-2101
文件大小464.17KB
发表时间2006
DOI10.1116/1.2217977

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