Cryogenic two-photon laser photolithography with SU-8

Lee, Kwan H.; Green, Alex M.; Taylor, Robert A.; Sharp, David N.; Turberfield, Andrew J.; Brossard, Frederic S. F.; Williams, David A.; Briggs, G. Andrew D.

期刊名称Applied Physics Letters
作者Lee, Kwan H.; Green, Alex M.; Taylor, Robert A.; Sharp, David N.; Turberfield, Andrew J.; Brossard, Frederic S. F.; Williams, David A.; Briggs, G. Andrew D.
卷第88卷
期第14期
印刷ISSN0003-6951
文件大小621.41KB
发表时间2006
DOI10.1063/1.2194311

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Cryogenic two-photon laser photolithography with SU-8