PREPARATION AND PIEZOELECTRIC PROPERTIES OF SOL-GEL-DERIVED NB-DOPED PZT FILMS FOR MEMS APPLICATIONS
- 期刊名称Integrated Ferroelectrics
- 作者KWOK, K. W.; KWOK, K. P.; TSANG, R. C. W.; CHAN, H. L. W.; CHOY, C. L.
- 卷第80卷
- 期第1期
- 印刷ISSN1058-4587
- 电子ISSN1607-8489
- 文件大小842.04KB
- 发表时间2006-11
- DOI10.1080/10584580600657377
- 页码155-162
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