[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - On-Chip 2-Axis Optical Fiber Actuator Using Gray-Scale Technology
- 作者Morgan, B.; Ghodssi, R.
- 文件大小427.88KB
- 发表时间2006
- DOI10.1109/memsys.2006.1627787
- 页码266-269
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