Reactive sputtering of hard nitride coatings using asymmetric-bipolar pulsed DC generator
- 作者Harish C. Barshilia; K.S. Rajam
- 卷第201卷
- 印刷ISSN0257-8972
- 文件大小573.64KB
- 发表时间2006
- DOI10.1016/j.surfcoat.2006.03.012
- 页码1827-1835
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