Fabrication of 4H-SiC p-Channel MOSFET with High Channel Mobility
Okamoto, Mitsuo; Tanaka, Mieko; Yatsuo, Tsutomu; Fukuda, Kenji
- 期刊名称Materials Science Forum
- 作者Okamoto, Mitsuo; Tanaka, Mieko; Yatsuo, Tsutomu; Fukuda, Kenji
- 电子ISSN1662-9752
- 文件大小392.03KB
- 发表时间2006
- DOI10.4028/www.scientific.net/msf.527-529.1301
- 页码1301-1304