lang1 0 0rang bar corner compensation for CMOS compatible anisotropic TMAH etching
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Mukhiya, R; Bagolini, A; Margesin, B; Zen, M; Kal, S
- 卷第16卷
- 期第11期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小843.41KB
- 发表时间2006-11-01
- DOI10.1088/0960-1317/16/11/029
- 页码2458-2462
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