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Resist-based measurement of the contrast transfer function in a 0.3 numerical aperture extreme ultraviolet microfield optic

Resist-based measurement of the contrast transfer function in a 0.3 numerical aperture extreme ultraviolet microfield optic

J. P. Cain; P. Naulleau; C. J. Spanos

作者J. P. Cain; P. Naulleau; C. J. Spanos
文件大小670.83KB
发表时间2006
DOI10.1116/1.2162578

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