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Micromechanical resonators and filters for microelectromechanical system applications

Micromechanical resonators and filters for microelectromechanical system applications

M. Motiee; R. R. Mansour; A. Khajepour

作者M. Motiee; R. R. Mansour; A. Khajepour
文件大小948.15KB
发表时间2006
DOI10.1116/1.2356865

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