Reaction mechanism of fluorinated chemically amplified resists
- 作者H. Yamamoto; T. Kozawa; K. Okamoto; A. Saeki; S. Tagawa; T. Ando; M. Sato; H. Komano
- 文件大小482.33KB
- 发表时间2006
- DOI10.1116/1.2214711
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