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Piezoresistive sensing of bistable micro mechanism state

Piezoresistive sensing of bistable micro mechanism state

J. K. Anderson; L. L. Howell; J. W. Wittwer; T. W. Mclain

作者J. K. Anderson; L. L. Howell; J. W. Wittwer; T. W. Mclain
文件大小890.15KB
发表时间2006
DOI10.1088/0960-1317/16/5/010

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