A quick method for AlCu interconnect electromigration performance predicting and monitoring
- 期刊名称Semiconductor Science and Technology
- 作者Zhang, Wenjie; Yi, Leeward; Tao, Kai; Ma, Yue; Chang, Pingyi; Mao, Duli; Wu, Jin; Zou, S C
- 卷第21卷
- 期第5期
- 印刷ISSN0268-1242
- 电子ISSN1361-6641
- 文件大小564.99KB
- 发表时间2006-05-01
- DOI10.1088/0268-1242/21/5/011
- 页码633-637
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