[IEEE 2006 IEEE International Conference on Systems, Man and Cybernetics - Taipei, Taiwan (2006.10.8-2006.10.11)] 2006 IEEE International Conference on Systems, Man and Cybernetics - An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System
- 作者Zhang, Huai; Jiang, Zhibin; Guo, Chengtao; Liu, Huiran
- 文件大小2545.22KB
- 发表时间2006
- DOI10.1109/icsmc.2006.384646
- 页码3411-3416
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