SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Large scale nanolaminate deformable mirror
Papavasiliou, Alexandros; Olivier, Scot; Barbee, Troy; Miles, Robin; Chang, Kevin; Olivier, Scot S.; Tadigadapa, Srinivas A.; Henning, Albert K.
- 作者Papavasiliou, Alexandros; Olivier, Scot; Barbee, Troy; Miles, Robin; Chang, Kevin; Olivier, Scot S.; Tadigadapa, Srinivas A.; Henning, Albert K.
- 卷第6113卷
- 印刷ISSN0277-786X
- 文件大小460.65KB
- 发表时间2006
- DOI10.1117/12.657666