SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 26 February 2006)] Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems - Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB
Trusov, Alexander; Tomizuka, Masayoshi; Yun, Chung-Bang; Acar, Cenk; Shkel, Andrei M.; Giurgiutiu, Victor
- 作者Trusov, Alexander; Tomizuka, Masayoshi; Yun, Chung-Bang; Acar, Cenk; Shkel, Andrei M.; Giurgiutiu, Victor
- 卷第6174卷
- 印刷ISSN0277-786X
- 文件大小2010.06KB
- 发表时间2006
- DOI10.1117/12.658932