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[IEEE Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2006.05.24-2006.05.27)] Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design - Proceeding of the 2nd International Conference of Young Scientists MEMSTECH 2006

[IEEE Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2006.05.24-2006.05.27)] Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design - Proceeding of the 2nd International Conference of Young Scientists MEMSTECH 2006

文件大小241.12KB
发表时间2006
DOI10.1109/memstech.2006.288645
页码2-2

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