[IEEE Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2006.05.24-2006.05.27)] Proceedings of the 2nd International Conference on Perspective Technologies and Methods in MEMS Design - International Program Committee
- 文件大小593.25KB
- 发表时间2006
- DOI10.1109/memstech.2006.288647
- 页码5-5
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