SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - MEMS actuated deformable mirror
Papavasiliou, Alexandros; Olivier, Scot S.; Tadigadapa, Srinivas A.; Olivier, Scot; Barbee, Troy; Henning, Albert K.; Walton, Chris; Cohn, Michael
- 作者Papavasiliou, Alexandros; Olivier, Scot S.; Tadigadapa, Srinivas A.; Olivier, Scot; Barbee, Troy; Henning, Albert K.; Walton, Chris; Cohn, Michael
- 卷第6113卷
- 印刷ISSN0277-786X
- 文件大小656.38KB
- 发表时间2006
- DOI10.1117/12.657667