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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Time Dependence Study Of Hydrogen-Induced Defects In Silicon During Thermal Anneals

[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Time Dependence Study Of Hydrogen-Induced Defects In Silicon During Thermal Anneals

Personnic, S.; Tauzin, A.; Bourdelle, K. K.; Letertre, F.; Kernevez, N.; Laugier, F.; Cherkashin, N.; Claverie, A.; Fortunier, R.
  • 作者Personnic, S.; Tauzin, A.; Bourdelle, K. K.; Letertre, F.; Kernevez, N.; Laugier, F.; Cherkashin, N.; Claverie, A.; Fortunier, R.
  • 卷第866卷
  • 文件大小527.72KB
  • 发表时间2006
  • DOI10.1063/1.2401463
  • 页码65-68
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